Design channels on silicon crystal plates, then pour liquid dimethylsiloxane onto these silicon crystal plates and heat to harden the dimethylsiloxane. When the dimethylsiloxane is removed, even the smallest microfluidic design details are imprinted on the PDMS plate. With this special silicone rubber plate, a reactive ion etching machine is used for hydrophilic surface modification. Once surface bonds are broken, typically a glass slide is placed on one side to activate the silicone. Once the bond returns to its normal state, the glass is permanently bonded to the dimethylsiloxane plate, transforming the originally designed channel on the silicon crystal plate into a waterproof channel. With this technology, components such as microfluidic channels, micromixers, micropumps, and microvalves can be produced at low cost, and the smallest transfer geometry can reach the nanometer level.
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